Semiconductor Filtration in South Korea

1. Background

South Korea is a global leader in semiconductor manufacturing, home to industry giants like Samsung Electronics and SK Hynix. Semiconductor production demands ultra-pure water and clean air, as even trace contaminants can cause chip defects and impact yield. Coconut shell granular activated carbon, with its high adsorption capacity, well-developed micropore structure, and high purity, is an ideal material for filtration systems in this industry. This case study focuses on a leading semiconductor manufacturing plant in Gyeonggi-do, South Korea, and illustrates how it leverages Xingsen Activated Carbon’s premium coconut shell granular activated carbon to optimize ultra-pure water treatment and cleanroom air purification.

2. Challenges

The semiconductor manufacturing plant faced the following key challenges:

• Ultra-Pure Water Purification: Removal of trace organic compounds, residual chlorine, and heavy metals from water to achieve a resistivity of ≥18 MΩ·cm.
• Cleanroom Air Quality: Elimination of volatile organic compounds (VOCs) and ammonia to maintain Class 100 cleanroom standards, preventing contamination on wafer surfaces.
• Sustainability and Cost: Adoption of environmentally friendly, renewable filtration materials while reducing operational costs, in line with South Korea’s green manufacturing policies.

3. Solution

The plant selected coconut shell granular activated carbon supplied by Xingsen Activated Carbon, which offers the following key properties:

• High Surface Area: Approximately 1200-1400 m²/g, with a well-developed micropore structure, ideal for adsorbing low-concentration contaminants.
• High Mechanical Strength: Resistant to abrasion, suitable for high-flow water treatment and gas filtration systems.
• Low Ash Content: High-purity design minimizes secondary contamination, meeting stringent semiconductor industry requirements.
• Regenerability: Supports thermal regeneration, extending service life and reducing costs.

Xingsen Activated Carbon’s rigorous quality control and reliable supply chain ensured the delivery of customized coconut shell granular activated carbon, enabling efficient operation of the filtration systems.

3.1 Ultra-Pure Water Treatment System

In the ultra-pure water production process, Xingsen coconut shell granular activated carbon was integrated into the pre-treatment stage before reverse osmosis (RO) and ion exchange resin systems. Its primary functions included:

• Adsorption of total organic carbon (TOC) and dissolved organic compounds.
• Removal of residual chlorine to protect downstream membranes and resins.
• Reduction of trace heavy metals to ensure water purity.

Implementation:

• Xingsen-supplied coconut shell granular activated carbon with a particle size of 1-2 mm was installed in the first stage of a multi-stage filtration system.
• The system processed 5,000 m³ of ultra-pure water daily, with modular activated carbon beds designed for easy maintenance and regeneration.
• Xingsen’s activated carbon was periodically regenerated thermally to maintain consistent adsorption performance.

3.2 Cleanroom Air Purification

In the cleanroom environment, Xingsen coconut shell granular activated carbon was used in air handling units (AHUs) in combination with HEPA filters to remove VOCs and ammonia.

Implementation:

• Coconut shell granular activated carbon with a particle size of 0.5-1 mm, supplied by Xingsen, was incorporated into high-efficiency filters.
• The filters processed approximately 100,000 m³ of air daily, operating in a Class 100 cleanroom.
• Xingsen’s activated carbon supported periodic regeneration, reducing replacement frequency.

4. Results

4.1 Ultra-Pure Water Treatment

• Water Quality Improvement: TOC was reduced from 10 ppb in feedwater to <1 ppb, with resistivity stabilized at 18.2 MΩ·cm.
• Chlorine Removal: Xingsen’s activated carbon achieved a 99.9% removal rate for residual chlorine, extending the lifespan of downstream equipment.
• Cost Efficiency: The activated carbon had a service life of approximately 12-18 months, and thermal regeneration reduced filtration material costs by about 25%.

4.2 Cleanroom Air Purification

• Contaminant Removal: VOC concentrations dropped from 50 ppb to <5 ppb, and ammonia levels were reduced to <1 ppb.
• Production Efficiency: Wafer defect rates decreased by approximately 15%, with stable cleanroom air quality.
• Maintenance Optimization: The low-dust properties of Xingsen’s activated carbon reduced filter maintenance frequency, improving operational efficiency.

5. Environmental and Economic Benefits

• Sustainability: Xingsen’s coconut shell activated carbon, made from renewable coconut shells, has a low carbon footprint, aligning with South Korea’s green manufacturing standards.
• Cost Savings: Through regeneration and reuse, the plant saved approximately 20-30% on filtration material costs annually.
• Stability: The uniform particle size and high purity of Xingsen’s activated carbon ensured long-term stability of the filtration systems, minimizing production downtime.

6. Conclusion

The application of Xingsen coconut shell granular activated carbon in South Korea’s semiconductor manufacturing demonstrates its superior performance in ultra-pure water treatment and cleanroom air purification. Its high adsorption capacity, low contamination, and regenerability make it an ideal choice for the semiconductor industry. Xingsen Activated Carbon’s high-quality products and dependable supply have provided the plant with an efficient, eco-friendly solution, supporting South Korea’s semiconductor industry in achieving high-purity filtration and sustainable development goals.